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| 2010-03-10 | ASML, Nikon lock horns on Intel 22nm litho biz ASML Holding NV and Nikon Corp. have locked horns on the 22nm lithography business at Intel Corp. |
| 2010-01-08 | Is TSMC switching to Nikon? In a surprise move, TSMC has procured a new 193nm immersion lithography scanner from rival Nikon Corp., according to sources. |
| 2009-09-23 | Soaring prices hinder Canon's litho dreams The end could be near for Canon Inc.'s lithography efforts, as the company is reportedly mulling plans to cease future, high-end scanner development, according to sources. |
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