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| 2009-04-28 | Fab tool vendors post poor results Fab tool vendors including Cymer, Lam Research, MKS and Novellus separately posted horrible results for the quarter. |
| 2009-02-25 | System improves yield, efficiency in solar cell production MKS Instruments introduces the Genesis Solar Yield Management System aimed at improving solar cell manufacturing. |
| 2006-01-06 | MKS acquires Ion Systems & Umetrics MKS acquires Ion Systems & Umetrics |
| 2005-11-30 | MKS Instruments to acquire Ion Systems MKS Instruments to acquire Ion Systems |
| 2005-08-08 | MKS unveils 'most flexible, versatile' ozone generation subsystem MKS unveils 'most flexible, versatile' ozone generation subsystem |
| 2005-09-20 | New solution for pressure measurement in semiconductor apps MKS Instruments introduced a compact and low current solution for pressure measurement in difficult semiconductor and biopharmaceutical apps where condensable by-products exist |
| 2001-10-05 | Accurately controlling the load lock vent cycle using Baratron capacitance manometer technology This application note presents a solution on how to control load lock venting with the use of MKS Type 41 atmospheric switch. |
| 2001-10-05 | DIP052 user's manual This application note presents an intensive discussion about the DIP052 general-purpose CAN bus interface for IBM PC/AT (ISA) bus-compatible systems. It explains DIP052 installation requirements, functions, configuration, etc. |
| 2001-10-05 | Capacitance manometer retrofit kits for AMAT 8100/8300 etch systems This application note describes heated manometer models as suitable replacements for the original problem-vulnerable MKS Type 370 Baratron sensor. |
| 2001-10-05 | DIP053 quad PC/AT to CAN adapter module This application note discusses the hardware description, installation process and device specifications of the DIP053 general-purpose CAN bus interface for IBM PC-/AT-based PCs. |
| 2001-10-05 | DIP065 user's manual This application note presents an intensive discussion of the DIP065 CAN serial interface module. It explains DIP065 hardware and functional requirements, protocol formats, device functions, etc. |
| 2001-10-05 | CDN137 user manual This application note describes functions, hardware description, installation and specification of the CDN137 general-purpose, board-level adapter for DeviceNet systems. |
| 2001-10-05 | CDN180 user manual This application note describes features, functions and specifications of the CDN180 DeviceNet Cube module for analog and digital interfaces. |
| 2001-10-05 | CDN220 high density I/O adapter user guide This application note discusses the features, functions, installation process and configuration of the CDN220 four-channel, DeviceNet-compatible I/O module. |
| 2001-10-05 | DNPocket instruction manual This application note describes installation and related hardware setup for the DNPocket GUI. |
| 2001-10-05 | CCO combinational control object This application note provides a general discussion of a distributed control object (Combinational Control Object or CCO) for other DeviceNet objects. An application illustrating how CCO can be used to easily implement logic sequences is essentially described. |
| 2001-10-05 | CDN105 user manual This application note describes features and functions of the CDN105 DeviceNet Cube module for digital interfaces. |
| 2001-10-05 | Controlling the pump down: Precise control with Baratron capacitance manometer technology This application note describes the use of the MKS Type 51 Baratron capacitance-based pressure switch to control the pump down and reduce potential product contamination. |
| 2001-10-05 | Effect of condensable effluent process contamination on capacitance manometers This application note presents a solution on how to resolve the effects of ambient temperature changes in capacitance manometers. |
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