Evanescent wave lithography to emerge at SPIE
Keywords: EWL evanescent wave lithography contact lithography Rochester Institute of Technology 26nm
[Summary of tips] Is a technology called evanescent wave lithography (EWL) the next big thing in semiconductor manufacturing?For years, researchers at the California Institute of Technology, the University of California at Berkeley and other universities have been exploring EWL. Some know this near-field technology as "contact lithography." In t......|
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