Immersion lithography 'nearly ready'
Keywords: Mark LaPedus Taiwan Semiconductor Mfg TSMC immersion lithography
[Summary of tips] Most experts believe that immersion lithography is still a year or two away from actual chip production. Many chip makers are scrambling to get the technology in production at the 45nm node in 2007 or so.But Taiwan Semiconductor Manufacturing Co. Ltd (TSMC) said that immersion lithography is "nearly production ready." TSMC clai......|
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