Lithography research stalls at 32nm
Keywords: lithography 32nm extreme ultraviolet lithography EUVL VLSI
[Summary of tips] Immersion lithography will allow the chip industry to continue scaling to Moore's Law for the next few years, but for chips with a 32nm half-pitch, lithographers are banking on either extreme ultraviolet or immersion 193nm scanners enhanced with high-index fluids to save the day. Neither option may be ready on time however, for......|
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