EUV lithography makes slow progress, reports Intel
Keywords: Intel EUV extreme ultraviolet lithography Mark LaPedus
[Summary of tips] An Intel Corp. technologist has disclosed that extreme ultraviolet (EUV) lithography is making little progress, prompting the firm to look at the deployment of immersion technology at its 32nm node.''There's not a whole lot of different with [EUV technology] from a year ago,'' said Mike Mayberry, director of components research......|
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