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ASML bags 45nm lithography deal

Posted: 14 Dec 2006  Print Version  Bookmark and Share Subscribe

Keywords: lithography  lithography immersion  45nm  microprocessor  193nm 

[Summary of tips] IBM Corp. and Advanced Micro Devices Inc. (AMD) presented papers describing the use of immersion lithography, ultra-low-k dielectrics, and multiple enhanced transistor strain techniques for 45nm microprocessor designs at the International Electron Devices Meeting.Both companies expect the first 45nm products using immersion lit......
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