ASML describes 22nm litho road map
Keywords: lithography systems 22nm single-patterning EUV systems
[Summary of tips] Amid a shaky economic climate, ASML Holding NV revealed its road map for lithography systems needed to drive semiconductors down to 22nm and beyond. ASML said it is prepared to ship its next-generation immersion lithography system next year and its extreme UV (EUV) system in 2010. The company's current single-patterning immersi......
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