Nikon puts EUV litho on hold
Keywords: EUV tools lithography EUV alpha tool beta tools
[Summary of tips] Lithography specialist Nikon is understood to have put on hold development of some of its EUV tools, which could give ASML a huge early advantage in commercial deployments of the emerging chip making technology. According to Richard Windsor, industry specialist at securities house Nomura, this is somewhat surprising as this tec......
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