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Is TSMC switching to Nikon?

Posted: 08 Jan 2010  Print Version  Bookmark and Share

Keywords:lithography  immersion scanner  double-patterning 

[Summary of tips] For years, foundry giant Taiwan Semiconductor Manufacturing Co. Ltd has primarily used ASML Holding NV as its lithography vendor. But in a surprise move, TSMC has procured a new 193nm immersion lithography scanner from rival Nikon Corp., according to sources.In fact, after being shut out of the leading-edge foundry equipment bu......
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