Global Sources
EE Times-India
Stay in touch with EE Times India
EE Times-India > Manufacturing/Packaging

Is TSMC switching to Nikon?

Posted: 08 Jan 2010     Print Version  Bookmark and Share

Keywords:lithography  immersion scanner  double-patterning 

[Summary of tips] For years, foundry giant Taiwan Semiconductor Manufacturing Co. Ltd has primarily used ASML Holding NV as its lithography vendor. But in a surprise move, TSMC has procured a new 193nm immersion lithography scanner from rival Nikon Corp., according to sources.In fact, after being shut out of the leading-edge foundry equipment bu......
Please login or register with us to view this article>>
1 • 2 Next Page Last Page

Comment on "Is TSMC switching to Nikon?"
*  You can enter [0] more charecters.
*Verify code:


Visit Asia Webinars to learn about the latest in technology and get practical design tips.


Go to top             Connect on Facebook      Follow us on Twitter      Follow us on Orkut

Back to Top