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Is TSMC switching to Nikon?

Posted: 08 Jan 2010  Print Version  Bookmark and Share Subscribe

Keywords: lithography  immersion scanner  double-patterning 

[Summary of tips] ASML vs. NikonCompared to ASML, Nikon represents a small piece of the procurement pie at TSMC. The relationship between TSMC and ASML goes back several years, when ASML was part of Philips Electronics N.V. One of TSMC's early shareholders was also Philips.TSMC was (and still is) one of the driving forces behind immersion lithog......
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