E-beam direct-write litho to be here only by 2015
Keywords: e-beam direct-write lithography nanoelectronics EUV
[Summary of tips] Even with multiple development efforts underway and reporting progress on e-beam direct-write, one prominent lithography researcher warns that production tools are still a minimum of five years away.Based on the length of time it has historically taken for each new lithography technology to move from proof-of-concept to produc......
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