E-beam direct-write litho to be here only by 2015
Keywords: e-beam direct-write lithography nanoelectronics EUV
[Summary of tips] Direct-write supportToppan is a member of the E-Beam Initiative. Kalk said Toppan recognises that for some chips that do not sell huge volumes, a full mask set can be cost-prohibitive. Toppan supports e-beam direct-write in the hopes that it will eventually enable companies doing lower-volume designs to do critical layers using......
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