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No innovation wall for 25nm MLC NAND
Keywords: 25nm NAND teardown NAND flash solid-state drive
[Summary of tips] The extent of immersion-lithography tool usage cannot be known, but our end-of-the-wordline analysis and STI pattern analysis of the IMFT device has shown some interesting spacing patterns that could give useful insight into the lithography and SADP processes. Technically, immersion lithography is the mainstream technology for ......Please login or register with us to view this article>>
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