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TSMC moves from 28nm to 20nm half-node

Posted: 15 Apr 2010  Print Version  Bookmark and Share Subscribe 

Keywords:TSMC 20nm process  lithography  high-k/metal gate  EUV 

[Summary of tips] Taiwan Semiconductor Manufacturing Co. Ltd will give the 22nm "full node" a miss by moving on directly to the 20nm "half node" from the 28nm node.At its technology conference, the foundry giant also provided details about its 20nm CMOS process, which will be the company's main technology platform after the 28nm node. TSMC will ......
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