EUV litho for 22nm unlikely to take-off
Keywords: extreme ultraviolet EUV lithography 22nm node
[Summary of tips] EUV comes closer to the technical specifications that would allow high volume manufacturing but its arrival time is unlikely to benefit the mass production of the 22nm node.Lithography scaling is getting harder and becoming affordable to fewer companies, leaving transitions to new processing nodes, almost metronomic throughout ......
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