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Performing internal inspection in MEMS devices

Posted: 05 Jul 2010  Print Version  Bookmark and Share Subscribe

Keywords: MEMS devices  MEMS acoustic imaging  gap type defects 

[Summary of tips] Non-destructive internal inspection of MEMS bonded wafer pairs via acoustic micro imaging is useful in finding, characterizing and eliminating anomalies and defects. During product development, acoustic inspection is helpful is modifying processes to avoid defects. During production, acoustic inspection spots rejects and identi......
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