Performing internal inspection in MEMS devices
Keywords: MEMS devices MEMS acoustic imaging gap type defects
[Summary of tips] Non-destructive internal inspection of MEMS bonded wafer pairs via acoustic micro imaging is useful in finding, characterizing and eliminating anomalies and defects. During product development, acoustic inspection is helpful is modifying processes to avoid defects. During production, acoustic inspection spots rejects and identi......|
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