Global Sources
EE Times-India
Stay in touch with EE Times India
 
 
Manufacturing/Packaging  

Visible light nanoscaling enhances photolithography

Posted: 11 Feb 2011  Print Version  Bookmark and Share Subscribe 

Keywords:multi-photon photoresists  Resolution Augmentation through Photo-Induced Deactivation  nanoscale resolution 

[Summary of tips] University of Maryland research team says that the use of multi-photon photoresists enabling visible light to achieve nanoscale resolution that is inversely dependent on exposure time will help take forward photolithography research on extremely short wavelengths of UV light."Most approaches to getting higher resolution with ph......
Please login or register with us to view this article>>
 


Comment on "Visible light nanoscaling enhances p..."
Comments:  
*  You can enter [0] more charecters.
*Verify code:
 
 

Go to top             Connect on Facebook      Follow us on Twitter      Follow us on Orkut

 
Back to Top