2018-05-30 - Rick Merritt

EUV Nears Production Readiness

The light at the end of the tunnel nears for EUV, as the industry collectively moves closer to production

2018-03-26 - Rick Merritt

Life After 5nm

2nm might not be worth it, thanks to law of diminishing returns

2018-02-27 - Rick Merritt

5nm Node EUV Proving Troublesome

Perilous random defects appear on the road to 5 and 3 nanometer chip production

2018-01-19 - Nitin Dahad, EE Times

EUV Backlog Grows as ASML Sets Sales Record

CEO says preparation to insert next-generation EUV lithography into volume manufacturing "shifted into a higher gear" last year.