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Extreme ultraviolet lithography still faces reliability issues, but it's ready for volume use, Intel's EUV chief said
The light at the end of the tunnel nears for EUV, as the industry collectively moves closer to production
13 percent annual expenditure growth in 2017 projected to be followed by further record years
2nm might not be worth it, thanks to law of diminishing returns
SkyWater produces 90nm wafers, and intends to stick to it
Cadence, Imec hard at work with 3nm process using EUV and immersion lithography
Perilous random defects appear on the road to 5 and 3 nanometer chip production
EUV lithography faces short-term gains and long-term challenges in resist, actinic inspection, mask and mask pellicles and light sources.
CEO says preparation to insert next-generation EUV lithography into volume manufacturing "shifted into a higher gear" last year.